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DYX-810P喷雾涂胶机
该产品适用于具有崎岖表面的异形基片表面光刻胶涂覆,主要应用于MEMS、陶瓷器件等领域。
It is suitable for PR coating on the surface of special-shaped substrate with rugged surface, mainly used in MEMS, ceramic devices and other fields.
主要技术特点 Main Features
喷胶单元 Spray Unit
采用超声或二流体喷头进行光刻胶雾化,光刻胶采用专用精密供液泵供给,精度高,供液稳定可靠。
Ultrasonic or two fluid spray nozzle is used for PR spray. PR is supplied by special pump with high precision and stable liquid supply.
工作台 Worktable Unit
XYZ轴工作台采用精密电缸驱动,无污染,扫描速度及加速度精度高、稳定性好。
XYZ axis worktable is driven by precision electric cylinder, no pollution, high accuracy of scanning speed and acceleration, good stability.
主轴单元 Spindle Unit
主轴电机采用交流无刷伺服电机,保证旋转转速、加速度控制精度高,稳定性好;加热机构采用接触式烘焙,加热控制精度高,温度均匀性好。
The main spindle motor adopts AC servo motor to ensure high accuracy and stability of rotation speed and acceleration control; the HP adopts contact baking, with high accuracy of heating control and good temperature uniformity.
主要技术指标 Main Specifications
最大晶圆尺寸 | 8″ |
Maximum Wafer Size |
8″ |
胶腔数量 | 1个 |
Number of Cup |
1 |
胶腔材质 | 进口PP |
Cup Material |
PP |
主轴转速 | 0~200rpm |
Spindle Speed |
0~200rpm |
额定 | 100rpm |
rated |
100rpm |
转速精度 | ±1rpm (0~100rpm) |
Speed Accuracy |
±1rpm(0~100rpm) |
光刻胶粘度 | ≤100Cp |
PR Viscosity |
≤100CP |
喷嘴数量 | 1套 |
Nozzle Quantity |
1 set |
胶液流量 | 1~5ml/min |
PR flow |
1~5ml/min |
胶液供给精度 | ±0.1ml |
PR Supply Accuracy |
±0.1ml |
雾化气体压力 | 0.1~0.3MPa |
N2 Pressure |
0.1~0.3MPa |
雾化气体流量 | 10~30L/min |
N2 flow |
10~30L/min |
电缸X轴最大速度 | 200mm/s |
Maximum Speed of XSpeed of X |
200mm/s |
电缸Y轴最大速度 |
200mm/s |
Maximum speed of Y |
200mm/s |
电缸精度 |
±0.1mm |
Accuracy of XY |
±0.1mm |
温度范围 |
50~150℃ |
Temperature Range |
50~150℃ |
温度均匀性 |
±3℃ |
Temperature Uniformity |
±3℃ |
外形尺寸(长x宽x高) |
1500mm×960mm×1600mm |
Outline Dimension(LxWxH) |
1500mm×960mm×1600mm |
重量 |
400Kg |
Weight | 400Kg |
销售电话 : 18618388462 / 18612902815
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