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DYX-430Y自动匀胶机
该设备为手动上下片,自动滴胶设备,可完成匀胶后烘焙工艺。最大适用5″标准晶圆,主要应用于分立器件、功率器件等行业。
The equipment is a manual up and down wafer, automatic PR dropping equipment, which can complete the baking process after coater. It is applicable to 5 " wafer, mainly used in discrete devices, power devices and other industries.
主要技术特点 Main Features
匀胶单元 Main Features
采用不锈钢匀胶腔体,中空轴伺服电机,具有密闭腔盖,保证匀胶过程中不产生胶丝。
It adopts stainless steel cup, hollow axis servo motor and sealed cup cover to ensure that no glue wire is produced in the process of coater.
热板单元 HP Unit
升温快、烘焙效果好,具有条形凸起,方便人工取放。
Fast temperature rise, good baking effect, with hump structure, convenient for manual access.
胶泵单元 PR Pump Unit
光刻胶采用精密胶泵供给,精度高,供液稳定可靠。
PR is supplied by precise PR pump with high precision and stable and reliable liquid supply.
主要技术指标 Main Specifications
最大晶圆尺寸 | 5″ |
Maximum wafer size |
5″ |
胶腔数量 | 3个 | Number of Coater |
3 |
胶腔材质 | 不锈钢 |
Cup Material |
stainless steel |
主轴转速 | 0~5000rpm |
Spindle Speed |
0~5000rpm |
最高 | 5000rpm |
maximum |
5000rpm |
转速精度 |
±2rpm (50~5000rpm) |
Speed Accuracy |
±2rpm(50~5000rpm) |
光刻胶供给量(Teflon吐出泵) | 1~10ml |
PR Supply (Teflon Pump) |
1~10ml |
光刻胶供给精度 | ±0.1ml |
Photoresist supply accuracy |
±0.1ml |
光刻胶粘度 | ≤500Cp |
PR viscosity |
≤500cp |
热板数量 | 1个 |
Number of HP |
1 |
温度范围 | 50~150℃ |
Temperature Range |
50~150℃ |
外形尺寸 | L1500mm×W1000mm×H1800mm |
Outline Dimension |
L1500mm×W1000mm×H1800mm |
重量 | 400Kg |
Weight |
400Kg |
销售电话 : 18618388462 / 18612902815
公司地址 : 河北省三河市燕郊开发区海油大街253号
网址 : www.jianhuagk.com
假冒国企平台举报电话:010-61594769
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