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DYX-420SY全自动匀胶机
该设备为星型全自动匀胶设备,主要应用于4″或5″晶圆涂胶、预烘工艺。采用标准片盒收放片,工艺过程单片处理,自动运行,主要适用于分立器件、功率器件等领域。
The equipment is a star type fully automatic coater. It is mainly used in 4 ″ or 5 ″ wafer coating and pre baker process. Adopt the standard cassette, single-chip processing, automatic operation. It is mainly suitable for discrete devices, power devices, etc.
主要技术特点 Main Features
传输机构 Transfer Unit
传输机构采用机械手进行晶圆的承载及传输,性能稳定,对晶圆背面污染小。
The transfer unit adopts robot to carry and transmit the wafer, which has stable performance and little pollution to the back of the wafer.
匀胶单元 Coater Unit
采用不锈钢匀胶腔体,中空轴伺服电机,具有密闭腔盖,保证匀胶过程中不产生胶丝。
It adopts stainless steel cup, hollow axis servo motor and sealed cup cover to ensure that no glue wire is produced in the process of coater.
热板单元 HP Unit
采用硬质阳极氧化热盘,受热均匀,易于擦拭。
Adopt hard anodizing hot plate, heat evenly, easy to wipe.
主要技术指标 Main Specifications
晶圆尺寸 | 4″、5″ |
Wafer Size |
4″, 5″ |
上/下片单元数量 |
4个(两个上片、两个下片) |
Number of Up / Down Cassette |
4 (two up and two down) |
手指数量 |
2个 |
Number of fingers |
2 |
胶腔数量 | 2个 |
Number of Coater |
2 |
主轴转速 | 0~5000rpm |
Spindle Speed |
0~5000rpm |
最高 | 5000rpm |
maximum |
5000rpm |
转速精度 |
±2rpm (50~5000rpm) |
Speed Accuracy |
±2rpm(50~5000rpm) |
光刻胶供给量(Teflon吐出泵) | 1~10ml |
PR Supply (Teflon Pump) |
1~10ml |
光刻胶供给精度 | ±0.1ml |
PR Supply Accuracy |
±0.1ml |
光刻胶粘度 | ≤500Cp |
PR viscosity |
≤500cp |
热板数量 | 4个 |
Number of HP |
4 |
温度范围 | 室温~180℃±1℃(可设置) |
Temperature Range |
room temperature~180℃±1℃ |
最小调整量 | 0.1℃ |
Minimum Adjustment |
0.1℃ |
温度均匀性 | ±2℃@50℃~100℃、±3℃@100.1℃~180℃ |
Temperature Uniformity |
±2℃@50℃~100℃, ±3℃@100.1℃~180℃ |
外形尺寸 | L1400mm×W1200mm×H1800mm |
Outline Dimension |
L1400mm×W1200mm×H1800mm |
重量 | 800Kg |
Weight |
800Kg |
销售电话 : 18618388462 / 18612902815
公司地址 : 河北省三河市燕郊开发区海油大街253号
网址 : www.jianhuagk.com
假冒国企平台举报电话:010-61594769
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