DYX-430SY自动匀胶机

采用星型布局形式，结构紧凑，效率高。

Adopt star layout, compact structure and high efficiency.

上/下片工位  Up / Down Station

铝制标准晶圆片盒，不变形、易转片。

Aluminum standard cassette, no deformation, easy to turn.

双臂机械手 Double Arm Robot

选用进口多关节双臂机械手，不仅具有较高的刚度、灵活性，而且传输速度快，定位精度高。

The imported multi joint double arm bobot not only has high rigidity and flexibility, but also has fast transmission speed and high positioning accuracy.

匀胶单元  Coater Unit

匀胶腔采用进口PP材料制成，主轴电机采用进口定制的中空轴交流无刷伺服电机，保证旋转转速、加速度控制精度高，重复性、稳定性好。

The cup is made of imported PP material. The spindle motor adopts the imported customized hollow AC brushless servo motor, ensure high accuracy, repeatability and stability of rotation speed and acceleration control.

冷/热板单元  CP/HP Unit

冷板/热板单元是对晶圆进行预烘及冷却处理，晶圆与盘体为非直接接触方式，温度稳定、精度高。

The CP/HP unit is to pre bake and cool the wafer. The wafer and the plate are not in direct contact, stable temperature and high precision.